CXF-320/3001

● Energy-saving: No friction, avoiding frictional heat loss, energy consumption reduced by 30% compared to other types of products. ● High efficiency: Longer continuous working time, high airflow, and high suction speed. ● Flexibility: Compact structure to meet smaller physical space requirements, install at any angle, suitable for various design needs, rich expansion features to meet customer customization needs.

Keywords: CXF-320/3001

Classification:

Maglev Molecular Pump Series

Hotline:

15051975986

Product Features

● Energy-saving: No friction, avoiding frictional heat loss, energy consumption reduced by 30% compared to other types of products

● High efficiency: Longer continuous working time, high airflow, and high pumping speed

● Flexibility: Compact structure, meets the need for smaller physical space, can be installed at any angle, suitable for various design requirements, rich expansion functions to meet customer customization needs

Technical Specifications

Inlet Flange	DN320 ISO F (standard configuration)	Outlet Flange	KF40
Pumping Speed Rate (L/s)	N2:2950 Ar:2750 He:2300 H2:1100	Compression Ratio	N2:>1E8 Ar:>1E8 He:>1E4 H2:>1E3
Ultimate Pressure (Pa)	1E-7 (rubber seal)	Maximum Instantaneous Inlet Flow Rate (sccm)	2100
Protective Gas Inlet Flange (optional)	KF10	Recommended Protective Gas Flow Rate	50
Maximum Allowable Magnetic Field Strength	Radial:3 Axial:15	Startup Time (min)	≤9
Shutdown Time (min)	≤12	Cooling Method	Water Cooling
Cooling Water Flow Rate (L/min)	3	Recommended Cooling Water Temperature (℃)	20±5
Power Supply Voltage (VAC)	220±10%, 50Hz 110±10%, 60Hz	Compatible Power Supply Model	CXFD-1601
Recommended Forepump	>=30	Weight (kg) (ISO F)	76

Application Fields

Scientific Research
Accelerators
Photovoltaics
Low-E Glass Coating
ITO Coating
Optical Coating
Decorative Coating
Flat Panel Display
Vacuum Furnace
Electric Vacuum
New Energy
New Materials
Vacuum Drying
Low Temperature Refrigeration
Thin Film Deposition
Etching
Ion Implantation
Photolithography
Electronic Devices

CXF-320/3002

CXF-250/2302