CXF-320/3002

● Energy-saving: No friction, avoiding frictional heat loss, energy consumption reduced by 30% compared to other types of products. ● High efficiency: Longer continuous working time, high airflow, and high suction speed. ● Flexibility: Compact structure to meet smaller physical space requirements, install at any angle, suitable for various design needs, rich expansion features to meet customer customization needs.

Keywords: CXF-320/3002

Classification:

Maglev Molecular Pump Series

Hotline:

15051975986

Product Features

● Energy-saving: No friction, avoiding frictional heat loss, energy consumption reduced by 30% compared to other types of products

● High efficiency: Longer continuous working time, high airflow, and high pumping speed

● Flexibility: Compact structure, meets the need for smaller physical space, can be installed at any angle, suitable for various design requirements, rich expansion functions to meet customer customization needs

Technical Specifications

Inlet Flange	DN320 ISO F (standard configuration)	Outlet Flange	KF40
Pumping Speed Rate (L/s)	N2:3260 Ar:2900 He:2550 H2:1730	Compression Ratio	N2:>1E8 Ar:>1E8 He:>1E4 H2:>1E3
Ultimate Pressure (Pa)	1E-7 (rubber seal)	Maximum Instantaneous Inlet Flow Rate (sccm)	2400
Protective Gas Inlet Flange (optional)	KF10	Recommended Protective Gas Flow Rate	50
Maximum Allowable Magnetic Field Strength	Radial:3 Axial:15	Rated Speed (rpm)	24000
Startup Time (min)	≤10	Shutdown Time (min)	≤14
Cooling Method	Water Cooling	Cooling Water Flow Rate (L/min)	3
Recommended Cooling Water Temperature (℃)	20±5	Power Supply Voltage (VAC)	220±10%, 50Hz 110±10%, 60Hz
Compatible Power Supply Model	CXFD-1601	Recommended Forepump	>=30

Application Fields

Scientific Research
Accelerators
Photovoltaics
Low-E Glass Coating
ITO Coating
Optical Coating
Decorative Coating
Flat Panel Display
Vacuum Furnace
Electric Vacuum
New Energy
New Materials
Vacuum Drying
Low Temperature Refrigeration
Thin Film Deposition
Etching
Ion Implantation
Photolithography
Electronic Devices

None

CXF-320/3001