CCQ-80A Ultra High Vacuum Pneumatic Slide Valve Series

● Drive method: Pneumatic ● Valve position indication: Magnetic induction switch ● Installation direction: Horizontal or cylinder facing up

Keywords: CCQ-80A Ultra High Vacuum Pneumatic Slide Valve Series

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Technical Specifications

Interface Flange	CF/ISO-F	Nominal Diameter (mm)	DN80
Applicable Range (Pa)	10^5~10^-6	Leak Rate (Pa·m³/s)	≤1.3x10^-10
Drive Method	Pneumatic	Working Air Pressure (MPa)	0.3～0.4
Valve Position Indication	Magnetic Induction Switch	Baking Temperature Resistance (℃)	Open: 150 Close: 120
Installation Direction	Horizontal or Cylinder Upward

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