DCFB-4200 Anti-shock Turbo Molecular Pump
● Pump body baking temperature (°C): <80
● Ambient temperature (°C): 5-40
● Installation direction: Vertical ±5°
● Pump weight (kg): ≈100
Keywords: DCFB-4200 Anti-shock Turbo Molecular Pump
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DCFB-4200 Anti-shock Turbo Molecular Pump
Model | DCFB-4200 | |
Inlet Flange | 400 ISO-K | |
Exhaust Flange | 100 ISO-K | |
Pumping Speed (L/S) (for air) | 4200 | |
Compression Ratio | N2 | >10-8 |
H2 | >6X102 | |
Ultimate Pressure (Pa) | <2x10-6 | |
Rated Speed (rpm) | 15600 | |
Bearing Used | Inlet Ceramic Bearing | |
Vibration Value (μm) | ≤0.15 | |
Startup Time (min) | <10 | |
Shutdown Time (min) | <20 | |
Recommended Forepump (L/S) | 30-70 | |
Cooling Method | Water Cooling | |
Cooling Water Temperature (℃) | ≤20 | |
Cooling Water Flow Rate (L/min) | 1 | |
Pump Body Baking Temperature (℃) | <80 | |
Ambient Temperature (℃) | 5-40 | |
Installation Direction | Vertical ±5° | |
Pump Weight (kg) | ≈100 |
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