DCFB-3600 and 4000 Anti-Impact Turbo Molecular Pumps
● Pump body baking temperature (°C): <80
● Ambient temperature (°C): 5-40
● Installation direction: Vertical ±5°
● Pump weight (kg): ≈100
Keywords: DCFB-3600 and 4000 Anti-Impact Turbo Molecular Pumps
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DCFB-3600 and 4000 Anti-Impact Turbo Molecular Pumps
Model | DCFB-3600 | ||
Inlet Flange | 400 ISO-K | ||
Exhaust Flange | 100 ISO-K | ||
Pumping Speed (L/S) (for air) | 3600 | 4000 | |
Compression Ratio | N | >10-8 | |
H2 | >6x102 | ||
Ultimate Pressure (Pa) | <2x10-6 | ||
Rated Speed (rpm) | 13500 | 15000 | |
Bearing Used | Inlet Ceramic Bearing | ||
Vibration Value (μm) | ≤0.15 | ||
Startup Time (min) | <10 | ||
Downtime (min) | <20 | ||
Recommended Forepump (L/S) | 30-70 | ||
Cooling Method | Water Cooling | ||
Cooling Water Temperature (℃) | ≤20 | ||
Cooling Water Flow Rate (L/min) | 2 | ||
Pump Body Baking Temperature (℃) | <80 | ||
Ambient Temperature (℃) | 5-40 | ||
Installation Direction | Vertical ±5° | ||
Pump Weight (kg) | ≈100 |
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DCFB-4200 Anti-shock Turbo Molecular Pump
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